Wafer measurement Wafer measurement

PerciLasers' high-performance industrial lasers have the characteristics of narrow linewidth, high power, and long life, and can be used for advanced industrial applications such as semiconductor wafer inspection, wafer measurement, and holographic exposure. We can also provide customized product development solutions to help your scientific research, development, and production.

Wafer Metrology Lasers - CW Lasers

	wavelength	power	Introduction	Features
	266nm	0.03W 0.1W 0.5W 1W	Based on the quadruple frequency solution, it outputs high-power continuous deep ultraviolet laser, which is suitable for semiconductor precision detection, measurement and other applications	High power Narrow line width Long life
	313nm	0.3W 1W 1.5W 2W	Based on high-power, low-noise fiber amplification and frequency summing technology, high-power narrow-linewidth laser output is achieved	High power Narrow line width Long life
	355nm	0.02W 0.04W	Based on a single-pass triple frequency scheme, it outputs ultraviolet laser, suitable for applications such as interference exposure	Stable and reliable Looks relevant Long life
	355nm	0.5W 2W 4W	Based on the resonant frequency doubling solution, it outputs high-power ultraviolet laser, which is suitable for applications such as interference exposure.	High power Looks relevant Long life
	532nm	0.2W 1.5W 10W 20W 30W 80W	Based on high-power, low-noise ytterbium-doped fiber amplification and frequency doubling technology, high-power narrow-linewidth laser output with a central wavelength of 532nm is achieved.	High power Narrow line width Long life
	780nm	0.2W 2W 8W 15W 20W	Based on high-power, low-noise erbium-doped fiber amplification and frequency doubling technology, high-power narrow-linewidth laser output is achieved.	High power Narrow line width Long life

Wafer Metrology Lasers - Pulsed Lasers

	wavelength	power	Introduction	Features
	266nm(Fiber Picosecond Laser)	5W	Based on the scheme of amplifying picosecond seeds and then doubling the frequency, high-power, high-repetition-rate ultraviolet lasers are output, which are suitable for quantum computing, semiconductor precision detection, etc.	High power Excellent beam quality High power stability High repetition rate
	266nm(Solid-state picosecond laser)	5W	Adopt solid state amplification solution to achieve high repetition rate and high power output, suitable for precision detection	High power Excellent beam quality High power stability High repetition rate
	355nm(Fiber Picosecond Laser)	1-6W	Based on the scheme of amplifying picosecond seeds and then doubling the frequency, high-power, high-repetition-rate ultraviolet lasers are output, which are suitable for quantum computing, semiconductor precision detection, etc.	High power Excellent beam quality High power stability High repetition rate
	355nm(Solid-state picosecond laser)	8W	Adopt solid state amplification solution to achieve high repetition rate and high power output, suitable for precision detection	High power Excellent beam quality High power stability High repetition rate